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| �y(c��)������ | �M���̵�1% |
| ���xϵ��(sh��) | 50:1 |
| �y(c��)�����x | 0.5�� |
| ���V푑�(y��ng) | 1μm |
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| ݗ���� | 0.2-1.0 |
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